Electric e-mat analysis [EMAT ANALYSIS]
This system consist of two parts:
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Semiconductor Device Parameter Analyzer (left)- RF impedance/material analyzer (right)
Semiconductor Device Parameter Analyzer
This part is an Agilent B1500A Semiconductor Device Parameter Analyzer whichis a complete solution for characterization of various devices. It supports various measurement capabilities for IV, CV,and enables a wide range of electrical characterizations and evaluations for device, material, semiconductor, active/passive component, and any electric devices.
Windows7 and powerful EasyEXPERT software support efficient and restorable device characterization on the GUI basis operation. It supports all aspects of IV and CV sweeps parametric tests. The EasyEXPERT software also provides efficient test environment for intuitive operation, analysis and exploration in device characterization. Some of its features are as follows::
- Supports all aspects of IV and CV sweepsparametric tests,
- Graph plot display/analysis/printing capabilities for analysis and reporting
- Interactive real-time characterization by knob based curve tracing with the auto-record feature
- Curve tracer test mode on EasyEXPERT provides rotary knob control variable sweep just like a conventional curve tracer
- Oscilloscope View visualizes voltage and current waveforms being applied to the device, therefore assists user to optimize test condition and to observe transient phenomenon of device
RF impedance/material analyzer
This part is an Agilent E4991A RF impedance/material analyzer offers ultimate impedance measurement performance and powerful built in analysis function todesigners who evaluate components and circuits in the range of 3 GHz. The E4991A uses an RF-IV technique, as opposed to the reflection measurement technique, for more accurate impedance measurement over wide impedance range. Basic impedance accuracy is +/-0.8%. High Q accuracy enables low-loss component analysis. The internal synthesizer sweeps frequency from 1 MHz to 3 GHz with 1 mHz resolution.
Measurement parameters: |Z|, |Y|, Ls, Lp, Cs, Cp, Rs(R), Rp, X, G, B, D, Q, θz, θy, |Γ|, Γx, Γy, θγ
Permittivity parameters: |εr|, εr', εr", tanδ
Permeability parameters: |μr|, μr', μr", tanδ
The following are application examples:
- RF impedance measurement of chip components such as ceramic capacitors, RF inductors, ferrite beads, and resistorsSemiconductors
- Capacitance-Voltage (C-V) characteristics and Equivalent Series Resistance (ESR) measurements of varactordiodesMaterials
- Permittivity and loss tangent evaluation of plastics, ceramics, printed circuit boards and other dielectric material
- Permeability and loss tangent evaluation of ferrite, amorphous and other magnetic materials