Metal Deposition [METAL-DEP]
| Metal Evaporator. The Mantis EV-Series mini e-beam evaporators are constructed from high-quality, strictly UHV-compatible materials and are fully bakeable to 250°C. The mounting hearths for the source materials and the surrounding evaporation head are highly efficient cooled, ensuring a rapid heat transfer to the cooling water. This allows all but the emission filament and the source material to remain at near ambient temperature, effectively eliminating the structural outgassing which often presents a problem with traditional electron beam evaporators, effusion cells and thermal evaporation boats. |
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All of the M-EV and QUAD-EV models have integrated flux monitoring plates. These provide real-time feedback of the deposition rate and also can be used in a closed loop control for absolute rate stability and control. The flux monitoring plates are located at the top of the source and below the shutter and can provide an accurate reading of the evaporation rate even with the shutter closed. E-beam evaporators are installed for thin film deposition of refractory metals or high-temperature ceramics.
Surface Science. The EV sources allow sub-monolayer per minute rate control enabling precise surface loading to be achieved.
Lift-Off Processes. The minimal heat-load from the sources coupled with the small spot profile from the source-leading to low angular spread at the sample face-makes this an excellent choice for achieving high-quality metal film structures.